JPH024238U - - Google Patents

Info

Publication number
JPH024238U
JPH024238U JP8209088U JP8209088U JPH024238U JP H024238 U JPH024238 U JP H024238U JP 8209088 U JP8209088 U JP 8209088U JP 8209088 U JP8209088 U JP 8209088U JP H024238 U JPH024238 U JP H024238U
Authority
JP
Japan
Prior art keywords
frequency power
high frequency
matching unit
power switch
switching mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8209088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8209088U priority Critical patent/JPH024238U/ja
Publication of JPH024238U publication Critical patent/JPH024238U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP8209088U 1988-06-20 1988-06-20 Pending JPH024238U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8209088U JPH024238U (en]) 1988-06-20 1988-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8209088U JPH024238U (en]) 1988-06-20 1988-06-20

Publications (1)

Publication Number Publication Date
JPH024238U true JPH024238U (en]) 1990-01-11

Family

ID=31306853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8209088U Pending JPH024238U (en]) 1988-06-20 1988-06-20

Country Status (1)

Country Link
JP (1) JPH024238U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171623A (ja) * 1989-10-03 1991-07-25 Applied Materials Inc 半導体ウェーハ製造用プラズマ処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171623A (ja) * 1989-10-03 1991-07-25 Applied Materials Inc 半導体ウェーハ製造用プラズマ処理方法

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